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Product: Processes and Equipment of Microtechnology. Modules 1 and 2 by Yuri Borisovich Tsvetkov Price: 1297.00 RUR
This textbook provides a structured overview of the general sequence of microtechnology processes, using the production of integrated circuits and a silicon micro-pressure sensor as practical examples. It covers key stages in obtaining silicon monocrystalline wafers and essential microtechnology operations, including wafer fabrication and oxidation. Special attention is paid to the relationship between material properties, structure, device design, and the electrical characteristics of microstructures. The book also examines physico-chemical models and methods for analyzing the quality of technological processes in microtechnology.
Designed for students at Bauman Moscow State Technical University (MSTU) pursuing degrees in “Electronics and Nanoelectronics” and “Nanoengineering,” this resource offers a foundational understanding of manufacturing techniques and quality assessment in the field.
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