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This book explores a highly relevant new direction in electronics: sensor technology, or, as it is known in domestic terminology, microsystems engineering. The authors represent Delft University of Technology, along with several leading Western firms whose developments and products are widely represented on the electronic components market.
The content reflects theoretical and practical achievements in the field of sensor systems, whose level qualifies them as intelligent. Patent protection for the proposed technical solutions indicates the global novelty of the sensor devices and high-precision measurement methods.
The book is intended to help intensify the development of sensors and sensor systems by presenting convincingly formulated promising directions for this branch of electronics, considering the borderline nature of the natural phenomena used. The theoretical and practical material presented will serve as a foundation for developers of microelectronic equipment, as well as being useful for teachers, graduate students, and students of technical universities.